Invention Application
US20170040321A1 GATE-ALL-AROUND NANOWIRE DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE
有权
GATE-ALL-AROUND NANOWIRE设备及其制造方法
- Patent Title: GATE-ALL-AROUND NANOWIRE DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE
- Patent Title (中): GATE-ALL-AROUND NANOWIRE设备及其制造方法
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Application No.: US15221396Application Date: 2016-07-27
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Publication No.: US20170040321A1Publication Date: 2017-02-09
- Inventor: Jerome Mitard
- Applicant: IMEC VZW
- Priority: EP15179950.9 20150806
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/66 ; H01L29/786 ; H01L21/8238 ; H01L29/06 ; H01L29/423

Abstract:
The disclosed technology generally relates to a semiconductor device, and more particularly to a gate all around (GAA) semiconductor device and a method for fabricating the same. In one aspect, a semiconductor device has a vertical stack of nanowires formed on a substrate, wherein the vertical stack of nanowires comprises an n-type nanowire and a p-type nanowire each extending in a longitudinal direction parallel to a main surface of the substrate. The n-type nanowire comprises a first material and the p-type nanowire comprises an inner part having two sides and an outer part at each side of the inner part in the longitudinal direction, wherein one or both of the two outer parts comprises a second material different from the first material. The n-type nanowire and the p-type nanowire each comprises a channel region electrically coupled to respective source and drain regions. The channel region of the p-type nanowire comprises the inner part. The device additionally includes a shared gate structure circumferentially surrounding the channel regions of the n-type and p-type nanowires.
Public/Granted literature
- US09991261B2 Gate-all-around nanowire device and method for manufacturing such a device Public/Granted day:2018-06-05
Information query
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