Invention Application
US20170059840A1 SCANNING MICROSCOPE 审中-公开
扫描显微镜

SCANNING MICROSCOPE
Abstract:
A scanning microscope includes: a varifocal lens that scans an object in an optical-axis direction of an objective; a scanner that scans the object in a direction orthogonal to the optical axis of the objective; and a controller configured to control the varifocal lens and the scanner.
Public/Granted literature
Information query
Patent Agency Ranking
0/0