发明申请
- 专利标题： DEVICE WITH SEPARATION LIMITING STANDOFF
- 专利标题（中）： 具有分离限制的设备
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申请号： US15232871申请日： 2016-08-10
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公开(公告)号： US20170062165A1公开(公告)日： 2017-03-02
- 发明人: Christopher S. GUDEMAN , Paul J. RUBEL
- 申请人： Innovative Micro Technology
- 申请人地址： US CA Goleta
- 专利权人： Innovative Micro Technology
- 当前专利权人： Innovative Micro Technology
- 当前专利权人地址： US CA Goleta
- 主分类号： H01H59/00
- IPC分类号： H01H59/00
摘要：
An MEMS device, having two substantially parallel surfaces are separated by an initial distance. At least one of the surfaces includes a raised feature that limits the gap between the surfaces to less than the initial distance when an actuating voltage is applied. In some embodiments, the raised feature limits the gap to about 66% of the initial distance.
公开/授权文献
- US3799475A Airflow control system for supersonic inlets 公开/授权日：1974-03-26