Invention Application
- Patent Title: ATOMIC LAYER CHEMICAL PATTERNS FOR BLOCK COPOLYMER ASSEMBLY
- Patent Title (中): 用于嵌段共聚物组装的原子层化学图案
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Application No.: US15215016Application Date: 2016-07-20
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Publication No.: US20170062229A1Publication Date: 2017-03-02
- Inventor: Paul Franklin Nealey , Tzu-Hsuan Chang , Shisheng Xiong , Zhenqiang Ma , Michael Scott Arnold , Robert Jacobberger
- Applicant: The University of Chicago , Wisconsin Alumni Research Foundation
- Main IPC: H01L21/308
- IPC: H01L21/308 ; H01J37/32 ; C09D153/00 ; C23C16/455

Abstract:
Provided herein are methods of directed self-assembly (DSA) on atomic layer chemical patterns and related compositions. The atomic layer chemical patterns may be formed from two-dimensional materials such as graphene. The atomic layer chemical patterns provide high resolution, low defect directed self-assembly. For example, DSA on a graphene pattern can be used achieve ten times the resolution of DSA that is achievable on a three-dimensional pattern such as a polymer brush. Assembly of block copolymers on the atomic layer chemical patterns may also facilitate subsequent etch, as the atomic layer chemical patterns are easier to etch than conventional pattern materials.
Public/Granted literature
- US09927706B2 Atomic layer chemical patterns for block copolymer assembly Public/Granted day:2018-03-27
Information query
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