Invention Application
US20170063020A1 SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LASER APPARATUS
审中-公开
用于产生极光紫外线灯和激光装置的系统和方法
- Patent Title: SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LASER APPARATUS
- Patent Title (中): 用于产生极光紫外线灯和激光装置的系统和方法
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Application No.: US15352543Application Date: 2016-11-15
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Publication No.: US20170063020A1Publication Date: 2017-03-02
- Inventor: Tatsuya YANAGIDA , Osamu WAKABAYASHI
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Priority: JP2010-076268 20100329; JP2010-254251 20101112
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H05G2/00
Abstract:
An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.
Public/Granted literature
- US10074956B2 System and method for generating extreme ultraviolet light, and laser apparatus Public/Granted day:2018-09-11
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