发明申请
- 专利标题： Optically Stimulated Electron Emission Measurement Device and Method for Characterizing and Comparing Levels and Species of Surface Contaminants
- 专利标题（中）： 光学刺激电子发射测量装置和表征污染物水平和物种比较的方法
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申请号： US15210444申请日： 2016-07-14
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公开(公告)号： US20170067819A1公开(公告)日： 2017-03-09
- 发明人: WILLIAM T. YOST , DANIEL F. PEREY
- 申请人： U.S.A., as represented by the Administrator of the National Aeronautics and Space Administration
- 专利权人： U.S.A., as represented by the Administrator of the National Aeronautics and Space Administration
- 当前专利权人： U.S.A., as represented by the Administrator of the National Aeronautics and Space Administration
- 主分类号： G01N21/27
- IPC分类号： G01N21/27 ; G01N21/33
摘要：
Systems, methods, instruments and devices of the various embodiments enable improved characterization and comparison of the level and species of surface contaminants from photo-induced emission analysis. The various embodiments may provide flexibility for calculating and analyzing the time-dependence of emission efficiencies. Irregular and heterogeneous surfaces, including regionally multiply-connected surface compositions, may be analyzed according to the various embodiments, and the various embodiments include techniques that support specific contaminant identification. Various embodiment focusing techniques may enhance assessment of spatially differential regional analysis of the substrate for more critical applications. The various embodiments may also include differential comparison with reference surfaces, either through differential comparison while scanning, or by comparison to digitally stored responses to known contaminants.
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