Invention Application
US20170075467A1 Capacitive force sensor and method for preparing the same 有权
电容力传感器及其制备方法

Capacitive force sensor and method for preparing the same
Abstract:
The present disclosure relates to a force sensor including a first substrate, a first electrode installed in a pattern on an upper surface of the first substrate, a second substrate disposed above and spaced apart from the first substrate, a second electrode installed in a pattern on a lower surface of the second substrate, facing the first electrode, and a dielectric interposed between the first substrate and the second substrate, wherein the dielectric includes a first dielectric surrounding an outside of the second electrode, and a pressure rib connecting the first dielectric to the first electrode, and a method for preparing the same, and shows a remarkably superior effect to related art, in terms of capacitance, interactivity and durability.
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