Invention Application
- Patent Title: CONDENSER MICROPHONE WITH NON-CIRCULAR MEMBRANE
- Patent Title (中): 具有非圆形膜的冷凝器麦克风
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Application No.: US15121831Application Date: 2014-03-03
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Publication No.: US20170078802A1Publication Date: 2017-03-16
- Inventor: Jan Tue Ravnkilde , Dennis Mortensen , Morten Ginnerup
- Applicant: Epcos AG
- International Application: PCT/EP2014/054094 WO 20140303
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R7/16 ; B81B3/00 ; H04R9/08
Abstract:
A non-uniform stress distribution of a MEMS microphone having a non-circular shape is compensated by a structured back plate that has a compensating structure to provide a stress distribution opposite to that of the membrane.
Public/Granted literature
- US10419858B2 Condenser microphone with non-circular membrane Public/Granted day:2019-09-17
Information query
