METHOD FOR PRODUCING SILICON USING MICROWAVE, AND MICROWAVE REDUCTION FURNACE
Abstract:
A microwave reduction furnace including a reaction furnace provided with a refractory chamber of silica or silicon carbide for storing a material therein, a supply section for supplying the material into the refractory chamber, the material being a mixture of a silica powder and a graphite powder or a mixture of a silica powder, a silicon carbide powder and a graphite powder, a discharge section for discharging molten silicon, obtained through reduction, out of the chamber, and a microwave oscillator for outputting microwave toward the refractory chamber in the reaction furnace with a degree of directionality by virtue of a helical antenna or a waveguide.
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