Invention Application
- Patent Title: NOISE SHIELDING TECHNIQUES FOR ULTRA LOW CURRENT MEASUREMENTS IN BIOCHEMICAL APPLICATIONS
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Application No.: US15240872Application Date: 2016-08-18
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Publication No.: US20170103952A1Publication Date: 2017-04-13
- Inventor: Roger J.A. Chen
- Applicant: Genia Technologies, Inc.
- Main IPC: H01L23/552
- IPC: H01L23/552 ; G01N33/487 ; G01N27/447 ; H01L23/522 ; H01L23/58

Abstract:
A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.
Public/Granted literature
- US09806033B2 Noise shielding techniques for ultra low current measurements in biochemical applications Public/Granted day:2017-10-31
Information query
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