- 专利标题: Evaporation Mask and Evaporation Device
-
申请号: US15291528申请日: 2016-10-12
-
公开(公告)号: US20170104186A1公开(公告)日: 2017-04-13
- 发明人: Xiaohu Li , Zhongyuan Sun
- 申请人: BOE Technology Group Co., Ltd.
- 优先权: CN201510658127.7 20151013
- 主分类号: H01L51/56
- IPC分类号: H01L51/56 ; C23C14/04
摘要:
An evaporation mask includes: shielding regions and evaporation regions arranged alternately, and a baffle at least covering the evaporation regions. The shielding regions are provided with shielding parts, and the baffle includes a plurality of evaporation sub-regions, and a plurality of openings are provided in each evaporation sub-region; the plurality of evaporation sub-regions include at least one first evaporation sub-region, and compared to rest evaporation sub-regions, a sum of areas of all openings in a unit area of the first evaporation sub-region is minimum; and the closer an evaporation sub-region to the first evaporation sub-region, the less a sum of areas of all openings in a unit area of the evaporation sub-region.
信息查询
IPC分类: