Invention Application
- Patent Title: RADIATION DETECTOR UBM ELECTRODE STRUCTURE BODY, RADIATION DETECTOR, AND METHOD OF MANUFACTURING SAME
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Application No.: US15391207Application Date: 2016-12-27
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Publication No.: US20170108594A1Publication Date: 2017-04-20
- Inventor: Masaomi Murakami , Makoto Mikami , Kouji Murakami , Akira Noda , Toru Imori
- Applicant: JX NIPPON MINING & METALS CORPORATION
- Priority: JP2014-137641 20140703; JP2015-099278 20150514
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L31/02 ; H01L31/115 ; H01L31/0224

Abstract:
The present invention provides a radiation detector UBM electrode structure body and a radiation detector which suppress the degradation of metal electrode layers at the time of formation of UBM layers and achieve sufficient electric characteristics, and a method of manufacturing the same. A radiation detector UBM electrode structure body according to the present invention includes a substrate made of CdTe or CdZnTe, comprising a Pt or Au electrode layer formed on the substrate by electroless plating, an Ni layer formed on the Pt or Au electrode layer by sputtering, and an Au layer formed on the Ni layer by sputtering.
Public/Granted literature
- US09823362B2 Radiation detector UBM electrode structure body, radiation detector, and method of manufacturing same Public/Granted day:2017-11-21
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