Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US15393609Application Date: 2016-12-29
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Publication No.: US20170110459A1Publication Date: 2017-04-20
- Inventor: Toshihiko SAITO
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2010-035435 20100219
- Main IPC: H01L27/105
- IPC: H01L27/105 ; H01L29/786 ; H01L27/12

Abstract:
At least one of a plurality of transistors which are highly integrated in an element is provided with a back gate without increasing the number of manufacturing steps. In an element including a plurality of transistors which are longitudinally stacked, at least a transistor in an upper portion includes a metal oxide having semiconductor characteristics, a same layer as a gate electrode of a transistor in a lower portion is provided to overlap with a channel formation region of the transistor in an upper portion, and part of the same layer as the gate electrode functions as a back gate of the transistor in an upper portion. The transistor in a lower portion which is covered with an insulating layer is subjected to planarization treatment, whereby the gate electrode is exposed and connected to a layer functioning as source and drain electrodes of the transistor in an upper portion.
Public/Granted literature
- US10020309B2 Semiconductor device Public/Granted day:2018-07-10
Information query
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