Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Application No.: US15252623Application Date: 2016-08-31
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Publication No.: US20170110571A1Publication Date: 2017-04-20
- Inventor: Yusuke KOBAYASHI , Manabu TAKEI , Shinsuke HARADA
- Applicant: FUJI ELECTRIC CO., LTD. , NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Kawasaki-shi JP Tokyo
- Assignee: FUJI ELECTRIC CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: FUJI ELECTRIC CO., LTD.,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Kawasaki-shi JP Tokyo
- Priority: JP2015-206285 20151020
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L29/16

Abstract:
In a front surface of a semiconductor base body, a gate trench is disposed penetrating an n+-type source region and a p-type base region to a second n-type drift region. In the second n-type drift region, a p-type semiconductor region is selectively disposed. Between adjacent gate trenches, a contact trench is disposed penetrating the n+-type source region and the p-type base region, and going through the second n-type drift region to the p-type semiconductor region. A source electrode embedded in the contact trench contacts the p-type semiconductor region at a bottom portion and corner portion of the contact trench, and forms a Schottky junction with the second n-type drift region at a side wall of the contact trench.
Public/Granted literature
- US09653599B2 Semiconductor device and method of manufacturing semiconductor device Public/Granted day:2017-05-16
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