- 专利标题: PHOTORESIST BOTTLE CAPABLE OF IMPROVING POOR COATING COVERAGE
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申请号: US15333105申请日: 2016-10-24
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公开(公告)号: US20170123311A1公开(公告)日: 2017-05-04
- 发明人: Zhiguo Zhu , Jun Zhu , Lijun Chen
- 申请人: Zhiguo Zhu , Jun Zhu , Lijun Chen
- 优先权: CN201510724265.0 20151029
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; B65D1/02 ; B65D23/02 ; C23C14/48
摘要:
A photoresist bottle capable of improving poor coating coverage is disclosed, which comprising: a sealed photoresist bottle body having a connector, a hard groove-shaped projection fixed on the bottom of the bottle body, an inner liner having an opening at the bottom, which is hermetically connected to the groove sidewall of the projection and is used to fill with the photoresist, a nitrogen gas tube inserting into the interspace between the bottle body and the soft liner through the connector, and a photoresist conduit inserting into the soft liner through the connector. Wherein, the top of the inner liner is hermetically connected to the upper lateral wall of the photoresist conduit, the lower end of the photoresist conduit reaches within the groove of the projection. When the soft liner is pressured, since unable to touch the photoresist outlets at the lower end of the photoresist conduit, a blocking can be avoided. Thereby, air bubbles and coating problems are prevented.