Invention Application
- Patent Title: IMAGING PANEL AND X-RAY IMAGING DEVICE
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Application No.: US15321127Application Date: 2015-06-22
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Publication No.: US20170139056A1Publication Date: 2017-05-18
- Inventor: Kazuhide TOMIYASU , Shigeyasu MORI
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Priority: JP2014-134724 20140630
- International Application: PCT/JP2015/067886 WO 20150622
- Main IPC: G01T1/20
- IPC: G01T1/20 ; H04N5/361 ; H04N5/378 ; H01L27/146 ; H04N5/32
Abstract:
A second insulating film is disposed so as to cover a conversion element that includes a first insulating film, photodiode, and electrode. The second insulating film is made of a SiNxOy material, where x is greater than 0 and y is greater than or equal to 0. This makes it possible to provide a TFT and photodiode with excellent anti-moisture characteristics.
Public/Granted literature
- US10353082B2 Imaging panel and X-ray imaging device Public/Granted day:2019-07-16
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