- 专利标题: Systems and Methods for Region-Adaptive Defect Detection
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申请号: US15350632申请日: 2016-11-14
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公开(公告)号: US20170140516A1公开(公告)日: 2017-05-18
- 发明人: Christopher Maher , Bjorn Brauer , Vijayakumar Ramachandran , Laurent Karsenti , Eliezer Rosengaus , John R. Jordan, III , Roni Miller
- 申请人: KLA-Tencor Corporation
- 主分类号: G06T7/00
- IPC分类号: G06T7/00 ; G06K9/74 ; G06K9/62 ; G06T7/11
摘要:
A defect detection method includes acquiring a reference image; selecting a target region of the reference image; identifying, based on a matching metric, one or more comparative regions of the reference image corresponding to the target region; acquiring a test image; masking the test image with the target region of the reference image and the one or more comparative regions of the reference image; defining a defect threshold for the target region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image contains a defect based on the defect threshold.
公开/授权文献
- US10535131B2 Systems and methods for region-adaptive defect detection 公开/授权日:2020-01-14
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