- 专利标题： STRUCTURE AND METHOD FOR HIGH PERFORMANCE LARGE-GRAIN-POLY SILICON BACKPLANE FOR OLED APPLICATIONS
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申请号： US15368524申请日： 2016-12-02
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公开(公告)号： US20170162388A1公开(公告)日： 2017-06-08
- 发明人: Ananda H. Kumar , Srinivas H. Kumar , Tue Nguyen
- 申请人： Ananda H. Kumar , Srinivas H. Kumar , Tue Nguyen
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; H01L21/266 ; H01L21/306 ; H01L21/265
摘要：
Large grain polysilicon films can be exfoliated on a handle substrate, such as a glass or glass-ceramic substrate. The large grain polysilicon can have high mobility for device formation, and can be used for backplane of a display or a sensor array for x-ray detection.
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