Invention Application
- Patent Title: MICROELECTROMECHANICAL GYROSCOPE WITH REJECTION OF DISTURBANCES AND METHOD OF SENSING AN ANGULAR RATE
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Application No.: US15197414Application Date: 2016-06-29
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Publication No.: US20170184400A1Publication Date: 2017-06-29
- Inventor: Carlo Valzasina , Huantong Zhang , Matteo Fabio Brunetto , Gert Ingvar Andersson , Erik Daniel Svensson , Nils Einar Hedenstierna
- Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC. , STMICROELECTRONICS INTERNATIONAL N.V.
- Priority: IT102015000088650 20151229
- Main IPC: G01C19/5776
- IPC: G01C19/5776

Abstract:
A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.
Public/Granted literature
- US10180324B2 Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate Public/Granted day:2019-01-15
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