Invention Application
- Patent Title: TFT and Manufacturing Method Thereof, Array Substrate and Manufacturing Method Thereof, and Display Device
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Application No.: US15300362Application Date: 2015-10-19
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Publication No.: US20170186784A1Publication Date: 2017-06-29
- Inventor: Wei Yang , Xiang Liu
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Priority: CN201510308890.7 20150608
- International Application: PCT/CN2015/092206 WO 20151019
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L21/425 ; H01L29/423 ; H01L29/786

Abstract:
A thin-film transistor (TFT) and a manufacturing method thereof, an array substrate and a manufacturing method thereof, and a display device are disclosed. The manufacturing method of a TFT includes: forming an active layer, a gate electrode, a source electrode and a drain electrode respectively electrically connected with the active layer, and a gate insulating layer disposed between the gate electrode and the active layer, so that the gate electrode, the source electrode and the drain electrode are formed in the same patterning process. The method can reduce the number of masks used in the manufacturing process of the TFT or an array substrate, reduce the technology process, improve the productivity, and reduce the production cost.
Public/Granted literature
- US10483296B2 TFT and manufacturing method thereof, array substrate and manufacturing method thereof, and display device Public/Granted day:2019-11-19
Information query
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