- 专利标题: RECESSED HARDMASK USED TO FORM HAMR NFT HEAT SINK
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申请号: US14987058申请日: 2016-01-04
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公开(公告)号: US20170194022A1公开(公告)日: 2017-07-06
- 发明人: Anusha Natarajarathinam , Yongjun Zhao , Hui Brickner , Dongsung Hong
- 申请人: Seagate Technology LLC
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
A method involves depositing a near-field transducer on a substrate of a slider. The near-field transducer comprises a plate-like enlarged portion and a peg portion. A first hard stop extending from the near field transducer and an air bearing surface is formed. A heat sink is formed on the enlarged portion and the first hard stop. A dielectric material is deposited over the near-field transducer and the heat sink. A second hard stop is deposited on the dielectric material away from the air bearing surface. The second hard stop comprises a recess corresponding in size and location to the heat sink. The method involves milling at an oblique angle to the substrate between the first hard stop and second hard stop to cut through the heat sink at the angle. The recess of the second hard stop increases a milling rate over the heat sink compared to a second milling rate of the dielectric away from the heat sink.
公开/授权文献
- US10224064B2 Recessed hardmask used to form HAMR NFT heat sink 公开/授权日:2019-03-05
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