Invention Application
- Patent Title: METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
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Application No.: US15401259Application Date: 2017-01-09
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Publication No.: US20170203956A1Publication Date: 2017-07-20
- Inventor: Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
- Applicant: Robert Bosch GmbH
- Priority: DE102016200497.2 20160115
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00

Abstract:
A method is provided for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. A first crystalline layer or a first amorphous layer or a first nanocrystalline layer or a first polycrystalline layer is deposited on or grown on a surface of the substrate or of the cap. A recess is introduced into the substrate or into the cap for accommodating the first crystalline layer or the first amorphous layer or the first nanocrystalline layer or the first polycrystalline layer.
Public/Granted literature
- US09890035B2 Method for manufacturing a micromechanical component Public/Granted day:2018-02-13
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