LINEAR MOTOR APPARATUS AND CONTROL METHOD
摘要:
This linear motor apparatus includes: a first linear motor and a second linear motor, movable bodies of which move in the same direction in a linked manner; a first control portion that causes the first linear motor to produce thrust to apply a load to a pressurizing target via the movable bodies; and a second control portion that causes the second linear motor to produce thrust and controls the thrust, wherein, if the first control portion is causing a load to be applied to the pressurizing target, then the second control portion causes the second linear motor to produce thrust that cancels an external force produced to the movable bodies.
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