- 专利标题: IRRADIATION APPARATUS, PATTERN IRRADIATION APPARATUS, AND SYSTEM
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申请号: US15407468申请日: 2017-01-17
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公开(公告)号: US20170210006A1公开(公告)日: 2017-07-27
- 发明人: Tatsuya TAKAHASHI
- 申请人: Tatsuya TAKAHASHI
- 优先权: JP2016-013726 20160127
- 主分类号: B25J9/16
- IPC分类号: B25J9/16 ; G02B5/02 ; G01C3/08 ; G02B27/30
摘要:
An irradiation apparatus includes a light source unit to emit light, a light condenser, disposed on a light path of the light emitted from the light source unit, to condense the light emitted from the light source unit, a first diffuser, disposed on a light path of the light exiting from the light condenser, to diffuse the light condensed by the light condenser, an optical equalizer, disposed downstream of the first diffuser, to equalize a luminance distribution of the light entering the optical equalizer from the first diffuser and to output the light having the equalized luminance distribution, and a second diffuser, disposed downstream of the optical equalizer, to diffuse the light exiting from the optical equalizer.
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