发明申请
- 专利标题: VACUUM LINEAR FEED-THROUGH AND VACUUM SYSTEM HAVING SAID VACUUM LINEAR FEED-THROUGH
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申请号: US15481619申请日: 2017-04-07
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公开(公告)号: US20170212428A1公开(公告)日: 2017-07-27
- 发明人: Matthias Roos , Eugen Foca
- 申请人: Carl Zeiss SMT GmbH
- 优先权: DE102014220220.5 20141007
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A vacuum linear feed-through (20), e.g., for an EUV lithography system, includes: a vacuum diaphragm bellows (21), which has a first end (21a) attaching a component and a second end (21b), opposite the first end, attaching to a vacuum housing, and an actuator device (27) generating a linear reciprocating motion of the bellows. The feed-through has at least one first shield (30, 30′), connected to the bellows at the first end, and at least one second shield (31, 31′), connected to the bellows at the second end. The first and second shield annularly surround the bellows, and the first and second shield overlap in the longitudinal direction of the bellows (21). At least one first shield and at least one second shield are formed of a permanently magnetic material, and/or the feed-through has a voltage-generating device (33) generating an electric field (E) between the first shield and the second shield.