发明申请
- 专利标题: NON-VOLATILE MEMORY DEVICE
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申请号: US15485334申请日: 2017-04-12
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公开(公告)号: US20170229476A1公开(公告)日: 2017-08-10
- 发明人: Jong-Won KIM , Chang-Seok KANG , Young-Woo PARK , Jae-Goo LEE , Jae-Duk LEE
- 申请人: Jong-Won KIM , Chang-Seok KANG , Young-Woo PARK , Jae-Goo LEE , Jae-Duk LEE
- 优先权: KR10-2015-0136347 20150925
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11565 ; H01L23/528 ; H01L27/1157
摘要:
A non-volatile memory device is provided. The non-volatile memory device includes a channel structure that is located on a substrate and extends perpendicularly to the substrate, a conductive pattern that extends perpendicularly to the substrate and is spaced apart from the channel structure, an electrode structure that is located between the channel structure and the conductive pattern, and comprises a plurality of gate patterns and a plurality of insulation patterns that are alternately laminated. An insulating layer that contacts with a top surface of the conductive pattern is formed along side surfaces of the electrode structure. The top surface of the conductive pattern is formed to be lower than the top surface of the channel structure.
公开/授权文献
- US10199389B2 Non-volatile memory device 公开/授权日:2019-02-05
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