- 专利标题: DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES
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申请号: US13959601申请日: 2013-08-05
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公开(公告)号: US20170243837A9公开(公告)日: 2017-08-24
- 发明人: Boris Kobrin , Nikunj Dangaria , Romuald Nowak , Michael T. Grimes
- 申请人: Applied Microstructures, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Applied Microstructures, Inc.
- 当前专利权人: Applied Microstructures, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/02
摘要:
An article having a surface treated to provide a protective coating structure in accordance with the following method: vapor depositing a first layer on a substrate, wherein said first layer is a metal oxide adhesion layer selected from the group consisting of an oxide of a Group IIIA metal element, a Group IVB metal element, a Group VB metal element, and combinations thereof; vapor depositing a second layer upon said first layer, wherein said second layer includes a silicon-containing layer selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride; and vapor depositing a third layer upon said second layer, wherein said third layer is a functional organic-comprising layer, wherein said functional organic-comprising layer is a SAM.