• Patent Title: THIN FILM TRANSISTOR AND PREPARATION METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY APPARATUS
  • Application No.: US15309949
    Application Date: 2016-04-08
  • Publication No.: US20170250207A1
    Publication Date: 2017-08-31
  • Inventor: Zuqiang WangChien Hung Liu
  • Applicant: BOE TECHNOLOGY GROUP CO., LTD.
  • Priority: CN201510330790.4 20150615
  • International Application: PCT/CN2016/078844 WO 20160408
  • Main IPC: H01L27/12
  • IPC: H01L27/12 H01L29/786
THIN FILM TRANSISTOR AND PREPARATION METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY APPARATUS
Abstract:
A thin film transistor and a preparation method thereof, an array substrate and a display apparatus are provided. The preparation method includes an operation of forming a low temperature poly silicon active layer; a substrate has a first region and a second region; and the step includes: forming a buffer layer on the first region and the second region of the substrate, the buffer layer having a thickness at a portion corresponding to the first region greater than that at a portion corresponding to the second region; or, forming the buffer layer on the first region of the substrate; forming an amorphous silicon layer on the buffer layer; performing laser crystallization processing on the amorphous silicon layer so as to convert the amorphous silicon layer into a poly silicon layer; and removing the poly silicon layer on the second region, and forming the low temperature poly silicon active layer on the first region.
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