Invention Application
- Patent Title: DISPLAY DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME
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Application No.: US15416064Application Date: 2017-01-26
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Publication No.: US20170250372A1Publication Date: 2017-08-31
- Inventor: Toshio TOJO , Hideki OZAWA , Yuki HAMADA
- Applicant: Japan Display Inc.
- Applicant Address: JP Minato-ku
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Minato-ku
- Priority: JP2016-036011 20160226
- Main IPC: H01L51/52
- IPC: H01L51/52 ; H01L51/50 ; H01L27/32 ; H01L51/00 ; H01L51/56

Abstract:
A method for manufacturing a display device includes a first step of placing a substrate having a lower electrode formed thereon in a vacuum environment; a second step of forming in a vacuum an organic layer that includes a light emitting layer and covers the lower electrode; a third step of forming in a vacuum an upper electrode that covers the organic layer; a fourth step of forming in a vacuum a sealing layer that covers the upper electrode; and a cleaning step of cleaning the substrate after end of the first step before end of the fourth step.
Information query
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