- 专利标题: ELECTRODE DESIGN AND LOW-COST FABRICATION METHOD FOR ASSEMBLING AND ACTUATION OF MINIATURE MOTORS WITH ULTRAHIGH AND UNIFORM SPEED
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申请号: US15509782申请日: 2015-09-09
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公开(公告)号: US20170250625A1公开(公告)日: 2017-08-31
- 发明人: Donglei Fan , Kwanoh Kim , Jianhe Guo
- 申请人: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 国际申请: PCT/US15/49129 WO 20150909
- 主分类号: H02N1/00
- IPC分类号: H02N1/00 ; C23C14/16 ; C23C14/58 ; H01F41/02 ; C23C14/30 ; H01F7/02 ; H01F1/01 ; C23C14/04 ; C23C14/02
摘要:
The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.
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