发明申请
- 专利标题: HEAT TREATMENT APPARATUS
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申请号: US15443379申请日: 2017-02-27
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公开(公告)号: US20170253520A1公开(公告)日: 2017-09-07
- 发明人: Kazuya UCHIDA , Takashi KOSHIGAI
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2016-041538 20160303
- 主分类号: C03B32/02
- IPC分类号: C03B32/02 ; F27D11/02 ; F27B1/12 ; F27B9/14 ; C03B37/10 ; F27B1/00
摘要:
It is an object of the present invention to allow a furnace core tube used for a heat treatment apparatus of a porous glass base material to be used for a long period of time.A heat treatment apparatus includes: a furnace core tube made of silica glass; a heater provided adjacent to the furnace core tube, the heater heating a heating region; and a moving mechanism supporting a porous glass base material and relatively moving the porous glass base material with respect to the heater in the furnace core tube in a state where the heating region is heated by the heater to make the porous glass base material pass through the heating region. The heat treatment apparatus includes a thin-walled part provided in a region adjacent to a portion located in the heating region in the furnace core tube, the thin-walled part having a thickness of glass less than that of the portion located in the heating region.
公开/授权文献
- US10781130B2 Heat treatment apparatus 公开/授权日:2020-09-22
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