Invention Application
- Patent Title: DEVICE EQUIPPED WITH AN ION BEAM SOURCE FOR COATING A SUBSTRATE IN A VACUUM CHAMBER
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Application No.: US15259069Application Date: 2016-09-08
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Publication No.: US20170263423A1Publication Date: 2017-09-14
- Inventor: Wolfgang Ebert
- Applicant: LO Laseroptik GmbH
- Priority: DE202016101274.0 20160308
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/50

Abstract:
A device has an ion beam source for coating at least one substrate in a vacuum chamber, which chamber has an inlet that is closable in a pressure-tight manner using a closure apparatus and through which the at least one substrate can be fixed in the vacuum chamber in a substrate holder in a substrate holder receptacle, and can be removed therefrom once the coating process has finished, wherein the substrate holder, together with the substrate, in the substrate holder receptacle is designed to be reversibly movable in a translational manner inside the vacuum chamber, between turning points that are in particular settable, using a motor-drivable transport apparatus of the device.
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