- 专利标题: RADIATION ANALYZING APPARATUS AND RADIATION ANALYZING METHOD
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申请号: US15465910申请日: 2017-03-22
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公开(公告)号: US20170276621A1公开(公告)日: 2017-09-28
- 发明人: Atsushi NAGATA , Satoshi NAKAYAMA , Keiichi TANAKA , Kazuo CHINONE
- 申请人: HITACHI HIGH-TECH SCIENCE CORPORATION
- 优先权: JP2016-059811 20160324
- 主分类号: G01N23/223
- IPC分类号: G01N23/223
摘要:
A radiation analyzing apparatus includes a radiation irradiation unit configured to irradiate an object with a first radiation, a radiation detection unit configured to detect a second radiation generated from the object irradiated with the first radiation, a radiation converging unit configured to disposed between the object and the radiation detection unit and to converge the second radiation on the radiation detection unit, a position changing unit configured to vary a relative positional relationship between the radiation converging unit and the radiation detection unit, and a driving unit configured to change the positional relationship.
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