Invention Application
- Patent Title: METHOD FOR PRODUCING SiC SINGLE CRYSTAL AND APPARATUS FOR PRODUCING SiC SINGLE CRYSTAL
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Application No.: US15517187Application Date: 2015-10-13
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Publication No.: US20170298533A1Publication Date: 2017-10-19
- Inventor: Kazuhiko KUSUNOKI , Kazuhito KAMEI , Kazuaki SEKI , Yutaka KISHIDA , Koji MORIGUCHI , Hiroshi KAIDO , Hironori DAIKOKU , Masayoshi DOI
- Applicant: NIPPON STEEL & SUMITOMO METAL CORPORATION , TOYOTA JIDOSHA KABUSHIKI KAISHA
- Priority: JP2014-213237 20141017
- International Application: PCT/JP2015/005169 WO 20151013
- Main IPC: C30B19/06
- IPC: C30B19/06 ; C30B19/08 ; C30B19/04 ; C30B29/36 ; C30B17/00

Abstract:
The provided by the disclosure is a SiC single crystal production method permitting suppression of temperature variation of a Si—C solution even in a case of long-time crystal growth. The SiC single crystal production method includes: a preparation step of preparing a production apparatus including a crucible, a seed shaft, and an internal lid; a formation step of heating the material in the crucible to form the Si—C solution; a growth step of bringing the seed crystal into contact with the Si—C solution to produce the Si—C single crystal on the seed crystal; an internal lid adjustment step of vertically moving one of the internal lid and the crucible relative to the other during the growth step to keep an amount of variation in vertical distance between the internal lid and the Si—C solution within a first reference range.
Information query