- 专利标题: COATING FILM, MANUFACTURING METHOD FOR SAME, AND PVD DEVICE
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申请号: US15511638申请日: 2014-09-17
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公开(公告)号: US20170306257A1公开(公告)日: 2017-10-26
- 发明人: Hideki MORIGUCHI , Tadashi SAITO , Yoshikazu TANAKA , Akinori SHIBATA , Tetsumi ARAHI , Katsuaki OGAWA , Takahiro OKAZAKI , Hiroyuki SUGIURA , Yoshihiro ITO
- 申请人: NIPPON ITF, INC. , NIPPON PISTON RING CO., LTD.
- 申请人地址: JP Kyoto JP Saitama
- 专利权人: NIPPON ITF, INC.,NIPPON PISTON RING CO., LTD.
- 当前专利权人: NIPPON ITF, INC.,NIPPON PISTON RING CO., LTD.
- 当前专利权人地址: JP Kyoto JP Saitama
- 国际申请: PCT/JP2014/074598 WO 20140917
- 主分类号: C10M103/02
- IPC分类号: C10M103/02 ; C23C14/06 ; C23C14/32
摘要:
Provided are a coating film, a manufacturing method for the same, and a PVD device that not only sufficiently improve the balance of low-friction properties and wear resistance, but also improve chipping resistance and peeling resistance. This film is coated on a substrate surface, wherein the coating film has a hard carbon that presents relatively black and white when observed in a cross-sectional bright-field TEM image, a mesh-shaped hard carbon layer is formed using a PVD method, said layer having white-colored hard carbon in a mesh shape extending in the thickness direction and black-colored hard carbon dispersed into the cavities in the mesh, and the ID/IG ratio is 1-6 when the mesh-shaped hard carbon layer is measured using Raman spectroscopy, said ratio being the ratio of the Raman spectrum D band peak area intensity and G band peak area intensity.
公开/授权文献
- US10457885B2 Coating film, manufacturing method for same, and PVD device 公开/授权日:2019-10-29
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