- 专利标题： METHOD AND DEVICE FOR ESTIMATING OPTICAL PROPERTIES OF A SAMPLE
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申请号： US15493589申请日： 2017-04-21
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公开(公告)号： US20170307524A1公开(公告)日： 2017-10-26
- 发明人: Veronica SORGATO , Michel Berger , Anne Planat-Chretien , Christine Vever-Bizet , Genevieve Bourg-Heckly , Charlotte Emain
- 申请人： Commissariat à l'ènergie atomique et aux énergies alternatives , Centre National De la Recherche Scientifique , Universite Pierre et Marie Curie (Paris 6)
- 申请人地址： FR Paris FR Paris FR Paris
- 专利权人： Commissariat à l'ènergie atomique et aux énergies alternatives,Centre National De la Recherche Scientifique,Universite Pierre et Marie Curie (Paris 6)
- 当前专利权人： Commissariat à l'ènergie atomique et aux énergies alternatives,Centre National De la Recherche Scientifique,Universite Pierre et Marie Curie (Paris 6)
- 当前专利权人地址： FR Paris FR Paris FR Paris
- 优先权： FR1653587 20160422
- 主分类号： G01N21/47
- IPC分类号： G01N21/47 ; G01N33/483
摘要：
A method and a device allow optical properties of a sample to be estimated. The method includes the illumination of the sample by a first light source, and the formation of an image of the sample thus illuminated, on the basis of which a first optical property is estimated, at various points on a surface of the sample. The method also includes measuring an auxiliary optical property of the sample and estimating the first optical property, taking account of the auxiliary optical property measured on the sample.