Invention Application
- Patent Title: OPTICAL GAS CONCENTRATION MEASURING METHOD, AND METHOD FOR MONITORING GAS CONCENTRATION BY SAID METHOD
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Application No.: US15524815Application Date: 2015-11-20
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Publication No.: US20170315051A1Publication Date: 2017-11-02
- Inventor: Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Shigetoshi Sugawa , Rihito Kuroda
- Applicant: FUJIKIN INCORPORATED , TOHOKU UNIVERSITY
- Priority: JP2014-237220 20141123
- International Application: PCT/JP2015/082742 WO 20151120
- Main IPC: G01N21/27
- IPC: G01N21/27 ; G01N21/33 ; C23C16/18 ; G01N33/00 ; C23C16/52

Abstract:
To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.
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