Invention Application
- Patent Title: Confinement Ring for Use in a Plasma Processing System
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Application No.: US15669742Application Date: 2017-08-04
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Publication No.: US20170330735A1Publication Date: 2017-11-16
- Inventor: Rajinder Dhindsa , Akira Koshishi , Alexei Marakhatanov
- Applicant: Lam Research Corporation
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
An apparatus for confining plasma within a plasma processing chamber is provided. The plasma processing chamber includes a lower electrode for supporting a substrate and an upper electrode disposed over the lower electrode. The apparatus is a confinement ring that includes a lower horizontal section extending between an inner lower radius and an outer radius of the confinement ring. The lower horizontal section includes an extension section that bends vertically downward at the inner lower radius, and the lower horizontal section further includes a plurality of slots. The confinement ring further includes an upper horizontal section extending between an inner upper radius and the outer radius of the confinement ring and a vertical section that integrally connects the lower horizontal section with the upper horizontal section. The extension section of the lower horizontal section is configured to surround the lower electrode when installed in the plasma processing chamber.
Public/Granted literature
- US10720314B2 Confinement ring for use in a plasma processing system Public/Granted day:2020-07-21
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