Invention Application
- Patent Title: COMBINED PATCH AND DESIGN-BASED DEFECT DETECTION
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Application No.: US15356799Application Date: 2016-11-21
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Publication No.: US20170345142A1Publication Date: 2017-11-30
- Inventor: Bjorn Brauer , Santosh Bhattacharyya
- Applicant: KLA-Tencor Corporation
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06K9/62

Abstract:
Defect detection is performed by comparing a test image and a reference image with a rendered design image, which may be generated from a design file. This may occur because a comparison of the test image and another reference image was inconclusive due to noise. The results of the two comparisons with the rendered design image can indicate whether a defect is present in the test image.
Public/Granted literature
- US10192302B2 Combined patch and design-based defect detection Public/Granted day:2019-01-29
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