Invention Application
- Patent Title: VERTICAL FIN FIELD EFFECT TRANSISTOR (V-FINFET), SEMICONDUCTOR DEVICE HAVING V-FINFET AND METHOD OF FABRICATING V-FINFET
-
Application No.: US15290456Application Date: 2016-10-11
-
Publication No.: US20170365526A1Publication Date: 2017-12-21
- Inventor: Soo Yeon JEONG , Myung Gil KANG
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66 ; H01L29/49 ; H01L29/06 ; H01L27/092 ; H01L23/535 ; H01L29/78 ; H01L29/417

Abstract:
A vertical fin field effect transistor (V-FinFET) is provided as follows. A substrate has a lower source/drain (S/D). A fin structure extends vertically from an upper surface of the lower S/D. The fin structure includes a sidewall having an upper sidewall portion, a lower sidewall portion and a center sidewall portion positioned therebetween. An upper S/D is disposed on an upper surface of the fin structure. An upper spacer is disposed on the upper sidewall portion. A lower spacer is disposed on the lower sidewall portion. A stacked structure including a gate oxide layer and a first gate electrode is disposed on an upper surface of the lower spacer, the center sidewall portion and a lower surface of the upper spacer. A second gate electrode is disposed on the first gate electrode
Public/Granted literature
Information query
IPC分类: