- 专利标题: VERTICAL NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
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申请号: US15485579申请日: 2017-04-12
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公开(公告)号: US20170365616A1公开(公告)日: 2017-12-21
- 发明人: Shin-hwan KANG , Heon-kyu LEE , Kohji KANAMORI , Jae-duk LEE , Jae-hoon JANG , Kwang-soo KIM
- 申请人: Shin-hwan KANG , Heon-kyu LEE , Kohji KANAMORI , Jae-duk LEE , Jae-hoon JANG , Kwang-soo KIM
- 优先权: KR10-2016-0076838 20160620
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L29/04 ; H01L27/1157 ; H01L27/11524 ; H01L21/768 ; H01L23/532 ; H01L23/528 ; H01L23/522 ; H01L29/16 ; H01L27/11556
摘要:
A vertical non-volatile memory device includes a substrate including a cell region; a lower insulating layer on the substrate; a lower wiring pattern in the cell region having a predetermined pattern and connected to the substrate through the lower insulating layer; and a plurality of vertical channel layers extending in a vertical direction with respect to a top surface of the substrate in the cell region, spaced apart from one another in a horizontal direction with respect to the top surface of the substrate, and electrically connected to the lower wiring pattern. The memory device also includes a plurality of gate electrodes stacked alternately with interlayer insulating layers in the cell region in the vertical direction along a side wall of a vertical channel layer and formed to extend in a first direction along the horizontal direction.
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