Invention Application
- Patent Title: METHOD FOR COLLECTIVE (WAFER-SCALE) FABRICATION OF ELECTRONIC DEVICES AND ELECTRONIC DEVICE
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Application No.: US15632878Application Date: 2017-06-26
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Publication No.: US20180005889A1Publication Date: 2018-01-04
- Inventor: Didier Campos , Benoit Besancon , Perceval Coudrain , Jean-Philippe Colonna
- Applicant: STMicroelectronics (Grenoble 2) SAS , STMicroelectronics SA , Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Grenoble FR Montrouge FR Paris
- Assignee: STMicroelectronics (Grenoble 2) SAS,STMicroelectronics SA,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: STMicroelectronics (Grenoble 2) SAS,STMicroelectronics SA,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Grenoble FR Montrouge FR Paris
- Priority: FR1656331 20160701
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L23/373 ; H01L23/00 ; H01L21/56 ; H01L21/683 ; H01L23/29 ; H01L21/782

Abstract:
Electronic devices are manufactured using a collective (wafer-scale) fabrication process. Electronic chips are mounted onto one face of a collective substrate wafer. A collective flexible sheet made of a heat-conductive material comprising a layer containing pyrolytic graphite is fixed to extend over a collective region extending over the electronic chips and over the collective substrate wafer between the electronic chips. The collective flexible sheet is then compressed. A dicing operation is then carried out in order to obtain electronic devices each including an electronic chip, a portion of the collective plate and a portion of the collective flexible sheet.
Public/Granted literature
- US09870947B1 Method for collective (wafer-scale) fabrication of electronic devices and electronic device Public/Granted day:2018-01-16
Information query
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