METHOD FOR RECOVERING SILICON PARTICLES AND ABRASIVE GRAINS FROM WASTED ABRASIVE SLURRY
摘要:
Disclosed herein is a method for recovering silicon particles and abrasive grains from a wasted abrasive slurry. The method includes providing a wasted abrasive slurry that contains silicon particles, abrasive grains and a water-soluble glycol, and mixing the wasted abrasive slurry with a metal chloride solution, so as to obtain a micelle layer and a slurry layer, the micelle layer including the water-soluble glycol, and the slurry layer including the silicon particles and the abrasive grains.
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