发明申请
- 专利标题: SEMICONDUCTOR DEVICE
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申请号: US15619703申请日: 2017-06-12
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公开(公告)号: US20180047667A1公开(公告)日: 2018-02-15
- 发明人: Shinichi UCHIDA , Yasutaka NAKASHIBA
- 申请人: Renesas Electronics Corporation
- 优先权: JP2016-157966 20160810
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L49/02
摘要:
A semiconductor device is provided with a SOI substrate including a semiconductor substrate, a BOX layer on the semiconductor substrate, and a semiconductor layer on the BOX layer, a multilayer wiring formed over a main surface of the SOI substrate, and an inductor comprised of the multilayer wiring. In a region located below the inductor, the BOX layer and the semiconductor layer are separated into a plurality of regions by an element isolation portion, and a dummy gate electrode is formed on a part of the semiconductor layer, which is located in each of the plurality of regions, via a dummy gate insulating film.
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