Invention Application
- Patent Title: Nonvolatile Storage Device and Method of Fabricating Nonvolatile Storage Device
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Application No.: US15670368Application Date: 2017-08-07
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Publication No.: US20180047787A1Publication Date: 2018-02-15
- Inventor: Genji NAKAMURA , Tamotsu MORIMOTO
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2016-156135 20160809
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A nonvolatile storage device includes: first wirings arranged in first and second directions that intersect each other, and extending in a third direction perpendicular to the first and second directions; second wirings extending in the first direction, and each of the second wiring installed at a predetermined interval from each other in the third direction; first layers disposed between the first wirings and the second wirings, and extending in the third direction along the plurality of first wirings; and memory cells installed between the first layers and the second wirings and at respective positions where the first layers and the second wirings intersect each other. Each memory cell includes a second layer disposed towards a side closer to the second wirings and a conductive intermediate layer disposed towards a side closer to the first layers.
Information query
IPC分类: