发明申请
- 专利标题： Apparatus for evaluation of deposition process in manufacturing of organic thin film
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申请号： US15687442申请日： 2017-08-26
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公开(公告)号： US20180056326A1公开(公告)日： 2018-03-01
- 发明人: Sung-Wan PYO , Oun-Gyu Lee , Young-Hwan Park
- 申请人： SFC CO., LTD. , Samsung Display Co., Ltd.
- 优先权： KR10-2016-0109881 20160829
- 主分类号： B05D1/00
- IPC分类号： B05D1/00
摘要：
Disclosed is an apparatus for evaluation of a deposition process in organic thin film-manufacturing processes using a chamber employing a deposition-preventing plate, by which it can be predicted whether a thin film layer formed on the deposition-preventing plate will be delaminated. Also provided is a method for evaluating a deposition process of an organic material, using the apparatus.
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