Invention Application
- Patent Title: RADIATION DETECTOR AND RADIATION DETECTION DEVICE USING THE SAME
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Application No.: US15556789Application Date: 2015-07-06
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Publication No.: US20180059263A1Publication Date: 2018-03-01
- Inventor: Norifumi KAMESHIRO , Akio SHIMA
- Applicant: HITACHI, LTD.
- Priority: JPPCT/JP2015/056790 20150309
- International Application: PCT/JP2015/069453 WO 20150706
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L31/0312 ; H01L31/115 ; H01L31/02 ; H01L31/0224

Abstract:
There is provided a radiation detector using SiC and of a structure in which an electric field is applied to the interior of the entire SiC crystal constituting a radiation sensible layer, aiming to detect radiation while suppressing a reduction in electric signals generated in the radiation sensible layer.The radiation detector includes: a radiation sensible layer formed of silicon carbide and configured to generate an electron hole pair due to radiation entering it; a first semiconductor region in contact with a first principal surface of the radiation sensible layer and exhibiting a first impurity concentration at least in the region in contact with the radiation sensible layer; a second semiconductor region in contact with a second principal surface on the opposite side of the first principal surface and exhibiting a second impurity concentration at least in the region in contact with the radiation sensible layer; a first electrode connected to the first semiconductor region; and a second electrode connected to the second semiconductor region. The impurity concentration in the radiation sensible layer adjacent to the first semiconductor region, with the first principal surface serving as a border, is discontinuous with the first impurity concentration; the impurity concentration in the radiation sensible layer adjacent to the second semiconductor region, with the second principal surface serving as a border, is discontinuous with the second impurity concentration; and an electric field is applied to the entire radiation sensible layer in the depth direction thereof at a voltage during operation.
Public/Granted literature
- US11119228B2 Radiation detector and radiation detection device using the same Public/Granted day:2021-09-14
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