- 专利标题: RAW MATERIAL FOR CHEMICAL DEPOSITION COMPOSED OF ORGANOPLATINUM COMPOUND, AND CHEMICAL DEPOSITION METHOD USING THE RAW MATERIAL FOR CHEMICAL DEPOSITION
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申请号: US15558057申请日: 2016-05-09
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公开(公告)号: US20180066357A1公开(公告)日: 2018-03-08
- 发明人: Ryosuke HARADA , Toshiyuki SHIGETOMI , Kazuharu SUZUKI , Shunichi NABEYA , Akiko KUMAKURA , Rumi KOBAYASHI , Takayuki SONE
- 申请人: TANAKA KIKINZOKU KOGYO K.K.
- 优先权: JP2015-096975 20150512
- 国际申请: PCT/JP2016/063692 WO 20160509
- 主分类号: C23C16/18
- IPC分类号: C23C16/18 ; C23C16/46 ; C07F15/00 ; H01L49/02
摘要:
The present invention relates to a raw material for chemical deposition in a formula shown below and including an organoplatinum compound in which an alkenyl amine and an alkyl anion are coordinated to divalent platinum. In the formula, n is 1 or more and 5 or less. Each of substituents R1 to R5 on the alkenyl amine is a hydrogen atom, an alkyl group or the like and has a carbon number of 4 or less. Each of alkyl anions R6 and R7 is an alkyl group having a carbon number of 1 or more and 3 or less. The raw material has high vapor pressure enough to make possible the manufacturing of a platinum thin film at low temperature and also has moderate thermal stability.
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