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发明申请
US20180067400A1 SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF A NUMBER OF MIRRORS OF A LITHOGRAPHY SYSTEM 审中-公开

  • 专利标题： SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF A NUMBER OF MIRRORS OF A LITHOGRAPHY SYSTEM
  • 申请号： US15807813
    申请日： 2017-11-09
  • 公开(公告)号： US20180067400A1
    公开(公告)日： 2018-03-08
  • 发明人: Jan Horn , Stefan Krone , Lars Berger
  • 申请人： Carl Zeiss SMT GmbH
  • 优先权： DE102015209077.9 20150518
  • 主分类号： G03F7/20
  • IPC分类号： G03F7/20 ;  G01B11/00 ;  G01B11/26
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF A NUMBER OF MIRRORS OF A LITHOGRAPHY SYSTEM
摘要：
Sensor arrangements, methods for ascertaining a respective position of a number of mirrors of a lithography apparatus, projection systems of a lithography apparatus, and lithography apparatus are disclosed. The sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.
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