Invention Application
- Patent Title: MEMS ACTUATION SYSTEMS AND METHODS
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Application No.: US15699007Application Date: 2017-09-08
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Publication No.: US20180072565A1Publication Date: 2018-03-15
- Inventor: Matthew Ng , Xiaolei Liu , Guiqin Wang
- Applicant: MEMS Drive, Inc.
- Main IPC: B81C1/00
- IPC: B81C1/00
Abstract:
A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.
Public/Granted literature
- US10523135B2 MEMS actuation systems and methods Public/Granted day:2019-12-31
Information query
